Structure of crystallized layers by laser annealing of 〈100〉 and 〈111〉 self-implanted silicon samples

詳細情報 詳細情報について

• CRID

  1360861713257516416

• DOI

  10.1007/bf00886154

• ISSN

  14320630

  03403793

• Web Site

  http://link.springer.com/content/pdf/10.1007/BF00886154.pdf

  http://link.springer.com/article/10.1007/BF00886154/fulltext.html

  http://link.springer.com/content/pdf/10.1007/BF00886154

• データソース種別

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