-
- Daniela Gogova
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Misagh Ghezellou
- Department of Physics, Chemistry and Biology, IFM, Linköping University 2 , 581 83 Linköping, Sweden
-
- Dat Q. Tran
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Steffen Richter
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Alexis Papamichail
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Jawad ul Hassan
- Department of Physics, Chemistry and Biology, IFM, Linköping University 2 , 581 83 Linköping, Sweden
-
- Axel R. Persson
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Per O. Å. Persson
- Department of Physics, Chemistry and Biology, IFM, Linköping University 2 , 581 83 Linköping, Sweden
-
- Olof Kordina
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Bo Monemar
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Matthew Hilfiker
- Department of Electrical and Computer Engineering, University of Nebraska-Lincoln 5 , Lincoln, Nebraska 68588, USA
-
- Mathias Schubert
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Plamen P. Paskov
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
-
- Vanya Darakchieva
- Center for III-Nitride Technology, C3NiT-Janzen, Linköping University 1 , 581 83 Linköping, Sweden
抄録
<jats:p>The hot-wall metalorganic chemical vapor deposition (MOCVD) concept, previously shown to enable superior material quality and high performance devices based on wide bandgap semiconductors, such as Ga(Al)N and SiC, has been applied to the epitaxial growth of β-Ga2O3. Epitaxial β-Ga2O3 layers at high growth rates (above 1 μm/h), at low reagent flows, and at reduced growth temperatures (740 °C) are demonstrated. A high crystalline quality epitaxial material on a c-plane sapphire substrate is attained as corroborated by a combination of x-ray diffraction, high-resolution scanning transmission electron microscopy, and spectroscopic ellipsometry measurements. The hot-wall MOCVD process is transferred to homoepitaxy, and single-crystalline homoepitaxial β-Ga2O3 layers are demonstrated with a 2̄01 rocking curve width of 118 arc sec, which is comparable to those of the edge-defined film-fed grown (2̄01) β-Ga2O3 substrates, indicative of similar dislocation densities for epilayers and substrates. Hence, hot-wall MOCVD is proposed as a prospective growth method to be further explored for the fabrication of β-Ga2O3.</jats:p>
収録刊行物
-
- AIP Advances
-
AIP Advances 12 (5), 055022-, 2022-05-01
AIP Publishing