Silicon based nano lead for single cell recording

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In this paper "nano lead" is defined as a submicron scale electrode for recording a neural activity from a single cell. The nano lead was fabricated with the technique of EB direct writing, DRIE, and FIB. The tiny recording site of the nano lead made very high electrode impedance at the low frequency, 100 M/spl Omega/ at 100 Hz and 500 M/spl Omega/ at DC. It caused the base line of the nerve potential unstable, but the IPSP signals of Aplysia were measured clearly.

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