Production of novel 3D microstructures using excimer laser mask projection techniques
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- Bernard Courtois
- editor
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- Selden B. Crary
- editor
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- Wolfgang Ehrfeld
- editor
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- Hiroyuki Fujita
- editor
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- Jean Michel Karam
- editor
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- Karen W. Markus
- editor
Journal
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- SPIE Proceedings
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SPIE Proceedings 1999-03-10
SPIE
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Details 詳細情報について
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- CRID
- 1361137043466847872
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- ISSN
- 0277786X
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- Data Source
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- Crossref