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Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides
Journal
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- IEEE Journal of Selected Topics in Quantum Electronics
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IEEE Journal of Selected Topics in Quantum Electronics 24 (4), 1-11, 2018-07
Institute of Electrical and Electronics Engineers (IEEE)
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Details 詳細情報について
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- CRID
- 1361137044430951680
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- ISSN
- 15584542
- 1077260X
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- Data Source
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- Crossref
