書誌事項
- 公開日
- 2002-06
- 権利情報
-
- https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
- DOI
-
- 10.1109/jmems.2002.1007397
- 公開者
- Institute of Electrical and Electronics Engineers (IEEE)
この論文をさがす
収録刊行物
-
- Journal of Microelectromechanical Systems
-
Journal of Microelectromechanical Systems 11 (3), 188-195, 2002-06
Institute of Electrical and Electronics Engineers (IEEE)