The spatial distribution of negative oxygen ion densities in a dc reactive magnetron discharge
書誌事項
- 公開日
- 2012-12-13
- 権利情報
-
- http://iopscience.iop.org/info/page/text-and-data-mining
- http://iopscience.iop.org/page/copyright
- DOI
-
- 10.1088/0022-3727/46/4/045203
- 公開者
- IOP Publishing
この論文をさがす
収録刊行物
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- Journal of Physics D: Applied Physics
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Journal of Physics D: Applied Physics 46 (4), 045203-, 2012-12-13
IOP Publishing