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- Damon Russell
- California Institute of Technology , Pasadena, California 91107, USA
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- Kieran Cleary
- California Institute of Technology , Pasadena, California 91107, USA
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- Rodrigo Reeves
- California Institute of Technology , Pasadena, California 91107, USA
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説明
<jats:p>A probe station, suitable for the electrical characterization of integrated circuits at cryogenic temperatures is presented. The unique design incorporates all moving components inside the cryostat at room temperature, greatly simplifying the design and allowing automated step and repeat testing. The system can characterize wafers up to 100 mm in diameter, at temperatures <20 K. It is capable of highly repeatable measurements at millimeter-wave frequencies, even though it utilizes a Gifford McMahon cryocooler which typically imposes limits due to vibration. Its capabilities are illustrated by noise temperature and S-parameter measurements on low noise amplifiers for radio astronomy, operating at 75–116 GHz.</jats:p>
収録刊行物
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- Review of Scientific Instruments
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Review of Scientific Instruments 83 (4), 044703-, 2012-04-01
AIP Publishing
