Full closed-loop controls of micro/nano positioning system with nonlinear hysteresis using micro-vision system

詳細情報 詳細情報について

• CRID

  1361137045261390976

• DOI

  10.1016/j.sna.2017.02.013

• ISSN

  09244247

• Web Site

  https://api.elsevier.com/content/article/PII:S092442471630992X?httpAccept=text/xml

  https://api.elsevier.com/content/article/PII:S092442471630992X?httpAccept=text/plain

• データソース種別

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