Silicon nanomembrane phototransistor flipped with multifunctional sensors toward smart digital dust
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- Gongjin Li
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Zhe Ma
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China.
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- Chunyu You
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Gaoshan Huang
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Enming Song
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Ruobing Pan
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Hong Zhu
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Jiaqi Xin
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Borui Xu
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
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- Taeyoon Lee
- Department of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, South Korea.
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- Zhenghua An
- Department of Physics, Fudan University, Shanghai 200433, P. R. China.
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- Zengfeng Di
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China.
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- Yongfeng Mei
- Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
説明
<jats:p>Flexible phototransistors are integrated with stimuli-responsive materials for multimodal sensing via CMOS-compatible strategy.</jats:p>
収録刊行物
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- Science Advances
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Science Advances 6 (18), 2020-05
American Association for the Advancement of Science (AAAS)
