Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide
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- Qing Peng
- North Carolina State University Department of Chemical and Biomolecular Engineering, , Raleigh, North Carolina 27695
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- Joseph C. Spagnola
- North Carolina State University Department of Materials Science and Engineering, , Raleigh, North Carolina 27695
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- Hojo Daisuke
- North Carolina State University Department of Chemical and Biomolecular Engineering, , Raleigh, North Carolina 27695
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- Kie Jin Park
- North Carolina State University Department of Chemical and Biomolecular Engineering, , Raleigh, North Carolina 27695
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- Gregory N. Parsons
- North Carolina State University Department of Chemical and Biomolecular Engineering, , Raleigh, North Carolina 27695
書誌事項
- 公開日
- 2008-05-01
- DOI
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- 10.1116/1.2917072
- 公開者
- American Vacuum Society
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説明
<jats:p>The authors demonstrate that low temperature (<200 °C) thermal decomposition of metal-organic precursors dissolved in supercritical carbon dioxide (scCO2) is an effective method to penetrate into dense three-dimensional networks and deposit conformal metal oxide films with tunable thickness. The results specifically show that thermal decomposition of gallium acetylacetonate in scCO2, leads to conformal coatings of gallium oxide on multiwalled carbon nanotube forests with a fast deposition rate (∼3–4 nm/min), without the need for any cosolvent. Moreover, as-formed metal oxide/nanotube structures can be further conformally coated by metal atomic layer deposition to produce nanotube/oxide/metal nanocomposites.</jats:p>
収録刊行物
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- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 26 (3), 978-982, 2008-05-01
American Vacuum Society