Real-time, interferometrically measuring atomic force microscope for direct calibration of standards

DOI PDF 被引用文献21件
  • S. Gonda
    Department of Mechanical Metrology, National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba 305-8563, Japan
  • T. Doi
    Department of Mechanical Metrology, National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba 305-8563, Japan
  • T. Kurosawa
    Department of Mechanical Metrology, National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba 305-8563, Japan
  • Y. Tanimura
    Department of Mechanical Metrology, National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba 305-8563, Japan
  • N. Hisata
    Department of Product Development, Olympus Optical Co., Ltd., 2951, Ishikawa-cho, Hachioji-shi, Tokyo 192-8507, Japan
  • T. Yamagishi
    Department of Product Development, Olympus Optical Co., Ltd., 2951, Ishikawa-cho, Hachioji-shi, Tokyo 192-8507, Japan
  • H. Fujimoto
    Department of Product Development, Olympus Optical Co., Ltd., 2951, Ishikawa-cho, Hachioji-shi, Tokyo 192-8507, Japan
  • H. Yukawa
    Department of Product Development, Olympus Optical Co., Ltd., 2951, Ishikawa-cho, Hachioji-shi, Tokyo 192-8507, Japan

書誌事項

公開日
1999-08-01
DOI
  • 10.1063/1.1149920
公開者
AIP Publishing

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説明

<jats:p>An atomic force microscope with a high-resolution three-axis laser interferometer for real-time correction of distorted topographic images has been constructed and investigated. With this apparatus, standard samples for a scanning probe microscope can be directly calibrated on the basis of stabilized wavelength of He–Ne lasers. The scanner includes a three-sided mirror block as a mobile target mirror for the interferometer, which realizes a rectangular coordinate system. The position coordinates of the sample is independently and simultaneously acquired with high-resolution (0.04 nm) X/Y/Z interferometer units and fed back for XY servo scanning and height image construction. The probe is placed on the sample surface at the intersection of the three optical axes of the interferometer with good reproducibility, so that the Abbe error caused by the rotation of the scanner is minimized. Image distortion in the XY plane and vertical overshoot/undershoot due to nonlinear motion of piezo devices, hysteresis, and creep are eliminated. The optical properties of the interferometers, mechanical characteristics of the scanner, and system performances in dimensional measurements for calibration standards are demonstrated.</jats:p>

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