Electrostatic model for an asymmetric combdrive

DOI PDF 1 Citations

Journal

Journal of Microelectromechanical Systems

Journal of Microelectromechanical Systems 9 (1), 126-135, 2000-03

Institute of Electrical and Electronics Engineers (IEEE)

Citations (1)*help

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Details 詳細情報について

CRID

1361137046289996416
DOI

10.1109/84.825787
ISSN

19410158

10577157
Web Site

http://xplorestaging.ieee.org/ielx5/84/17875/00825787.pdf?arnumber=825787
Data Source
- Crossref

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