High performance 14nm SOI FinFET CMOS technology with 0.0174µm <sup>2</sup> embedded DRAM and 15 levels of Cu metallization

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  • C-H. Lin
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • B. Greene
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Narasimha
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • J. Cai
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • A. Bryant
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • C. Radens
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • V. Narayanan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • B. Linder
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • H. Ho
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • A. Aiyar
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • E. Alptekin
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • J-J. An
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • M. Aquilino
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • R. Bao
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • V. Basker
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • N. Breil
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • M. Brodsky
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • W. Chang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • L. Clevenger
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • D. Chidambarrao
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • C. Christiansen
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • D. Conklin
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • C. DeWan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • H. Dong
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • L. Economikos
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • B. Engel
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Fang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • D. Ferrer
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • A. Friedman
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • A. Gabor
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • F. Guarin
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • X. Guan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • M. Hasanuzzaman
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • J. Hong
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • D. Hoyos
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • B. Jagannathan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Jain
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S-J. Jeng
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • J. Johnson
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • B. Kannan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • Y. Ke
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • B. Khan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • B. Kim
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Koswatta
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • A. Kumar
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • T. Kwon
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • U. Kwon
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • L. Lanzerotti
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • H-K Lee
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • W-H. Lee
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • A. Levesque
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • W. Li
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • Z. Li
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • W. Liu
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Mahajan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • K. McStay
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • H. Nayfeh
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • W. Nicoll
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • G. Northrop
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • A. Ogino
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • C. Pei
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Polvino
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • R. Ramachandran
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • Z. Ren
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • R. Robison
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • I. Saraf
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • V. Sardesai
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Saudari
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • D. Schepis
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • C. Sheraw
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Siddiqui
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • L. Song
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • K. Stein
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • C. Tran
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • H. Utomo
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • R. Vega
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • G. Wang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • H. Wang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • W. Wang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • X. Wang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • D. Wehelle-Gamage
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • E. Woodard
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • Y. Xu
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • Y. Yang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • N. Zhan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • K. Zhao
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • C. Zhu
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • K. Boyd
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • E. Engbrecht
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • K. Henson
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • E. Kaste
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Krishnan
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • E. Maciejewski
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • H. Shang
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • N. Zamdmer
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • R. Divakaruni
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • J. Rice
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • S. Stiffler
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA
  • P. Agnello
    IBM Semiconductor Research and Development Center (SRDC), Hopewell Junction, NY 12533, USA

書誌事項

公開日
2014-12
権利情報
  • https://doi.org/10.15223/policy-029
  • https://doi.org/10.15223/policy-037
DOI
  • 10.1109/iedm.2014.7046977
公開者
IEEE

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