Amorphous Si — the role of MeV implantation in elucidating defect and thermodynamic properties

DOI Web Site Web Site 2 Citations

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 55 (1-4), 533-543, 1991-04

Elsevier BV

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CRID

1361137046521328128
DOI

10.1016/0168-583x(91)96226-b
ISSN

0168583X
Web Site

https://api.elsevier.com/content/article/PII:0168583X9196226B?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:0168583X9196226B?httpAccept=text/plain
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