Multipurpose sensor tips for scanning near-field microscopy

DOI PDF 被引用文献3件
  • C. Mihalcea
    Institute of Technical Physics, University of Kassel, D-34109 Kassel, Germany
  • W. Scholz
    Institute of Technical Physics, University of Kassel, D-34109 Kassel, Germany
  • S. Werner
    Institute of Technical Physics, University of Kassel, D-34109 Kassel, Germany
  • S. Münster
    Institute of Technical Physics, University of Kassel, D-34109 Kassel, Germany
  • E. Oesterschulze
    Institute of Technical Physics, University of Kassel, D-34109 Kassel, Germany
  • R. Kassing
    Institute of Technical Physics, University of Kassel, D-34109 Kassel, Germany

説明

<jats:p>The reproducible micromachining of hollow metal tips on Si cantilevers and their applicability to scanning probe microscopy techniques are described. Provided with apertures below 130 nm and hollow pyramidal tips proved to be highly suited probes for scanning near-field optical microscopy (SNOM). First results of combined SFM/SNOM measurements together with scanning electron microscopy (SEM) photographs of the new sensors are presented. The SNOM images show a resolution of about 100 nm demonstrating the usefulness of these probes.</jats:p>

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