Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness
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- Warren Montgomery
- Irresistible Materials Ltd. (United Kingdom)
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- Alexandra McClelland
- Irresistible Materials Ltd. (United Kingdom)
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- David Ure
- Irresistible Materials Ltd. (United Kingdom)
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- John Roth
- Nano-C, Inc. (United States)
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- Alex P. G. Robinson
- Irresistible Materials, Ltd. (United Kingdom)
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- Eric M. Panning
- editor
- Intel Corp. (United States)
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- Kenneth A. Goldberg
- editor
- Lawrence Berkeley National Lab. (United States)
Journal
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- SPIE Proceedings
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SPIE Proceedings 10143 1014328-, 2017-03-24
SPIE
- Tweet
Details 詳細情報について
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- CRID
- 1361418518919367552
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- ISSN
- 0277786X
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- Data Source
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- Crossref
