Giant Piezoelectricity on Si for Hyperactive MEMS

DOI Web Site 被引用文献28件
  • S. H. Baek
    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • J. Park
    Department of Electrical and Computer Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • D. M. Kim
    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • V. A. Aksyuk
    Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
  • R. R. Das
    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • S. D. Bu
    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • D. A. Felker
    Department of Physics, University of Wisconsin, Madison, WI 53706, USA.
  • J. Lettieri
    Department of Materials Science and Engineering, Penn State University, University Park, PA 16802, USA.
  • V. Vaithyanathan
    Department of Materials Science and Engineering, Penn State University, University Park, PA 16802, USA.
  • S. S. N. Bharadwaja
    Department of Materials Science and Engineering, Penn State University, University Park, PA 16802, USA.
  • N. Bassiri-Gharb
    Department of Materials Science and Engineering, Penn State University, University Park, PA 16802, USA.
  • Y. B. Chen
    Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109, USA.
  • H. P. Sun
    Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109, USA.
  • C. M. Folkman
    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • H. W. Jang
    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • D. J. Kreft
    Department of Electrical and Computer Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • S. K. Streiffer
    Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, USA.
  • R. Ramesh
    Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA.
  • X. Q. Pan
    Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109, USA.
  • S. Trolier-McKinstry
    Department of Materials Science and Engineering, Penn State University, University Park, PA 16802, USA.
  • D. G. Schlom
    Department of Materials Science and Engineering, Penn State University, University Park, PA 16802, USA.
  • M. S. Rzchowski
    Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
  • R. H. Blick
    Department of Electrical and Computer Engineering, University of Wisconsin, Madison, WI 53706, USA.
  • C. B. Eom
    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.

抄録

<jats:p>High-quality piezoelectric thin films are grown and exhibit superior properties for microelectromechanical systems.</jats:p>

収録刊行物

  • Science

    Science 334 (6058), 958-961, 2011-11-18

    American Association for the Advancement of Science (AAAS)

被引用文献 (28)*注記

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