X-ray and electron microscopy study of amorphous boron nitride films

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CiNii Books

Journal

Thin Solid Films

Thin Solid Films 172 (2), L75-L79, 1989-05

Elsevier BV

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CRID

1361418519483421312
DOI

10.1016/0040-6090(89)90656-1
ISSN

00406090
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https://api.elsevier.com/content/article/PII:0040609089906561?httpAccept=text/xml

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