Silicon knife-edge taper waveguide for ultralow-loss spot-size converter fabricated by photolithography

DOI PDF 7 Citations
  • R. Takei
    National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan
  • M. Suzuki
    National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan
  • E. Omoda
    National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan
  • S. Manako
    National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan
  • T. Kamei
    National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan
  • M. Mori
    National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan
  • Y. Sakakibara
    National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan

Abstract

<jats:p>For ultralow-loss and polarization-insensitive spot-size converters (SSCs) on a silicon platform, we propose and demonstrate a silicon knife-edge taper waveguide with a gradual decrease in height as well as width toward the taper end. The taper was fabricated using a double-patterning method involving i-line stepper photolithography and angled sidewall dry-etching. The SSC, with the knife-edge taper covered with a polymer secondary core, exhibited mode conversion losses of 0.35 and 0.21 dB for transverse electric-like and transverse magnetic-like modes, respectively.</jats:p>

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