Micro concentrator with opto-sense micro reactor for biochemical IC chip family. 3D composite structure and experimental verification
書誌事項
- 公開日
- 1999
- DOI
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- 10.1109/memsys.1999.746858
- 公開者
- IEEE
説明
The concentration process is an indispensable in various chemical operations for both detection and purification. However, little research to miniaturize it have been done so far. In this paper, the world-first micro concentrator chip using ultrafiltration membrane for biochemical micro devices is developed. The micro concentrator chip consists of ultrafiltration membrane to filter molecule and a micro reactor with optical sensor to detect progress of biochemical reaction optically. Basic performance as a concentrator and real-time monitoring in-chip protein synthesis are demonstrated successfully. Another important feature of this chip is fabrication method. The Micro Stereo Lithography (IH Process) being developed in author's laboratory enable to make the chip three dimensionally without any mask process. Both the packaging difficulty and leakage problem are eliminated completely.
収録刊行物
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- Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)
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Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) 376-381, 1999
IEEE
