Discharge diagnosis and controlled deposition of SnOx:F films by DC-reactive sputtering from a metallic tin target
書誌事項
- 公開日
- 1999-12
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- DOI
-
- 10.1016/s0257-8972(99)00290-x
- 公開者
- Elsevier BV
この論文をさがす
収録刊行物
-
- Surface and Coatings Technology
-
Surface and Coatings Technology 122 (2-3), 136-142, 1999-12
Elsevier BV