Ordering process of sputtered FePt films

DOI PDF 被引用文献6件
  • Y. K. Takahashi
    National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan
  • M. Ohnuma
    National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan
  • K. Hono
    National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan

書誌事項

公開日
2003-05-15
DOI
  • 10.1063/1.1538174
公開者
AIP Publishing

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説明

<jats:p>We have investigated the in situ ordering process of sputtered FePt thin films deposited on heated substrates at 300 °C with different thicknesses. The films thinner than 50 nm were composed of nanograins (∼5 nm) of disordered FePt phase. Recrystallization occured when films were grown thicker than 100 nm, and transformation twins were observed in recrystallized grains, in which ordering to the L10 structure was confirmed.</jats:p>

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