Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN

Takeshi Uchida, Kazuhide Kusakabe, Kazuhiro Ohkawa

doi:10.1016/j.jcrysgro.2007.01.022

Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN

DOI Web Site Web Site 被引用文献2件

書誌事項

公開日: 2007-06

権利情報

https://www.elsevier.com/tdm/userlicense/1.0/

DOI

10.1016/j.jcrysgro.2007.01.022

公開者: Elsevier BV

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説明

Abstract A modeling of reaction pathways in a TMAl/NH 3 /H 2 system including parasitic and polymeric reactions for computational simulations was constructed to study temperature and pressure dependences of growth rates and gas-phase chemistry in metalorganic vapor-phase epitaxial growth of AlN. AlN growth rates calculated were in good agreement with experimental data. Reactive molecules such as MMAlNH and Al–N became the major gas-phase species at the high-temperature range. With increasing pressure, the polymerization of these species was enhanced and AlN growth rate significantly decreased.