Scanning tunneling microscopy studies of structural disorder and steps on Si surfaces
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- B. S. Swartzentruber
- University of Wisconsin-Madison, Madison, Wisconsin 53706
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- Y.-W. Mo
- University of Wisconsin-Madison, Madison, Wisconsin 53706
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- M. B. Webb
- University of Wisconsin-Madison, Madison, Wisconsin 53706
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- M. G. Lagally
- University of Wisconsin-Madison, Madison, Wisconsin 53706
書誌事項
- 公開日
- 1989-07-01
- DOI
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- 10.1116/1.576167
- 公開者
- American Vacuum Society
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説明
<jats:p>Scanning tunneling microscopy observations of several forms of disorder on Si surfaces are presented. These include dimer vacancies on Si(001), step bunches associated with a morphological phase transition on vicinal Si(111), and step structure on vicinal Si(001). A recipe for cleaning of Si surfaces to produce a minimum amount of disorder is presented.</jats:p>
収録刊行物
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- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 7 (4), 2901-2905, 1989-07-01
American Vacuum Society
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詳細情報 詳細情報について
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- CRID
- 1361699993880906496
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- NII論文ID
- 30020304814
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- DOI
- 10.1116/1.576167
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- ISSN
- 15208559
- 07342101
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- データソース種別
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- Crossref
- CiNii Articles
