Angular distribution control of extreme ultraviolet radiation from laser-produced plasma by manipulating the nanostructure of low-density SnO2 targets

DOI PDF 被引用文献4件
  • Keiji Nagai
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • QinCui Gu
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • ZhongZe Gu
    Southeast University Nanjing Biological Science and Medical Engineering, , Jiangsu 210096, People’s Republic of China
  • Tomoharu Okuno
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Shinsuke Fujioka
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Hiroaki Nishimura
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • YeZheng Tao
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Yuzuri Yasuda
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Mitsuo Nakai
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Takayoshi Norimatsu
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Yoshinori Shimada
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Michiteru Yamaura
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Hidetsugu Yoshida
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Masahiro Nakatsuka
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Noriaki Miyanaga
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Katsunobu Nishihara
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Yasukazu Izawa
    Osaka University Institute of Laser Engineering (ILE), , 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan

書誌事項

公開日
2006-02-27
DOI
  • 10.1063/1.2180880
公開者
AIP Publishing

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説明

<jats:p>We have found that the divergence of a relatively monochromatic extreme ultraviolet (EUV) emission from a laser-produced plasma can be manipulated by changing the target morphology which is a porous low-density tin oxide (SnO2) structure. The fundamental light of a Nd-YAG laser was irradiated on the target with laser intensity of ∼1011W∕cm2 and pulse duration of 10ns. The nanostructure and density of the targets were tuned by a combination of colloidal polymer template and sol-gel processes [Gu, Nagai, Norimatsu, Fujioka, Nishimura, Nishihara, Miyanaga, and Izawa, Chem. Mater. 17, 1115 (2005)], which has a merit in large-scale preparation. When the target has an open cell nanostructure, the EUV emission directed predominantly along target normal, while a closed cell target exhibited divergent emission. The angular distribution may be affected by the orientation of the microstructured initial target, and this phenomenon can be applied to wavefront control of EUV emission.</jats:p>

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