Determination of negative-ion and electron parameters in an Ar/SF6 plasma

DOI PDF 被引用文献5件
  • E. Stamate
    Department of Systems Engineering, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan
  • K. Ohe
    Department of Systems Engineering, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan

書誌事項

公開日
1998-09-01
DOI
  • 10.1063/1.368406
公開者
AIP Publishing

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説明

<jats:p>A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron.</jats:p>

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