Collective Micro-Optics Technologies for VCSEL Photonic Integration

  • V. Bardinal
    LAAS, CNRS, 7 Avenue du Colonel Roche, F-31077 Toulouse, France
  • T. Camps
    LAAS, CNRS, 7 Avenue du Colonel Roche, F-31077 Toulouse, France
  • B. Reig
    LAAS, CNRS, 7 Avenue du Colonel Roche, F-31077 Toulouse, France
  • D. Barat
    LAAS, CNRS, 7 Avenue du Colonel Roche, F-31077 Toulouse, France
  • E. Daran
    LAAS, CNRS, 7 Avenue du Colonel Roche, F-31077 Toulouse, France
  • J. B. Doucet
    LAAS, CNRS, 7 Avenue du Colonel Roche, F-31077 Toulouse, France

書誌事項

公開日
2011-12-10
権利情報
  • http://creativecommons.org/licenses/by/3.0/
DOI
  • 10.1155/2011/609643
公開者
Wiley

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説明

<jats:p>We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration. These approaches imply either a hybrid assembly or a direct integration technique. They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level. In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing. Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed.</jats:p>

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