Laser-induced Epitaxial Growth (LEG) Technology for High Density 3-D Stacked Memory with High Productivity
書誌事項
- 公開日
- 2007-06
- DOI
-
- 10.1109/vlsit.2007.4339735
- 公開者
- IEEE
収録刊行物
-
- 2007 IEEE Symposium on VLSI Technology
-
2007 IEEE Symposium on VLSI Technology 80-81, 2007-06
IEEE