Fine pit pattern formation by EB-writing for a high density optical recording
収録刊行物
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- Microelectronic Engineering
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Microelectronic Engineering 57-58 223-230, 2001-09
Elsevier BV
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詳細情報 詳細情報について
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- CRID
- 1361699994630831104
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- NII論文ID
- 30005466420
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- ISSN
- 01679317
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- データソース種別
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- CiNii Articles