Interferometric measurements of electric field-induced displacements in piezoelectric thin films
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- A. L. Kholkin
- Laboratoire de Céramique, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
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- Ch. Wütchrich
- Laboratoire de Céramique, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
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- D. V. Taylor
- Laboratoire de Céramique, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
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- N. Setter
- Laboratoire de Céramique, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
書誌事項
- 公開日
- 1996-05-01
- DOI
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- 10.1063/1.1147000
- 公開者
- AIP Publishing
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説明
<jats:p>Interferometric measurements of electric field-induced displacements in piezoelectric thin films using single-beam and double-beam optical detection schemes are reported. It is shown that vibrational response measured with a single-beam interferometer includes a large contribution of the bending motion of substrate. Therefore, it is difficult to apply single-beam technique for piezoelectric measurements in thin films. To suppress the bending effect a high-resolution double-beam interferometer is proposed. The sensitivity of the interferometer is significantly improved in comparison with previously reported system. The interferometer is shown to resolve small displacements without using a lock-in technique. An example of the interferometric capabilities is demonstrated with experimental results on electric field, frequency, and time dependences of piezoelectric response for quartz and Pb(Zr,Ti)O3 thin film.</jats:p>
収録刊行物
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- Review of Scientific Instruments
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Review of Scientific Instruments 67 (5), 1935-1941, 1996-05-01
AIP Publishing