Multicusp ion sources (invited)

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  • K. N. Leung
    Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720

Abstract

<jats:p>During the last decade, different types of multicusp ion sources, such as high current, high concentration H+, H+2, or N+ ion sources, negative ion sources, radio-frequency-driven sources, and high charge state ion sources have been developed at the Lawrence Berkeley Laboratory. This article reviews the history of the research and development of these ion sources and their applications.</jats:p>

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