Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses

  • Toshiaki Kondo
    Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
  • Shigeki Matsuo
    Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
  • Saulius Juodkazis
    Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
  • Vygantas Mizeikis
    Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
  • Hiroaki Misawa
    Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan

書誌事項

公開日
2003-04-28
DOI
  • 10.1063/1.1569987
  • 10.25916/sut.26228309
  • 10.25916/sut.26228309.v1
公開者
AIP Publishing

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説明

<jats:p>Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.</jats:p>

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