Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses
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- Toshiaki Kondo
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
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- Shigeki Matsuo
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
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- Saulius Juodkazis
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
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- Vygantas Mizeikis
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
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- Hiroaki Misawa
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan
書誌事項
- 公開日
- 2003-04-28
- DOI
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- 10.1063/1.1569987
- 10.25916/sut.26228309
- 10.25916/sut.26228309.v1
- 公開者
- AIP Publishing
この論文をさがす
説明
<jats:p>Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.</jats:p>
収録刊行物
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- Applied Physics Letters
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Applied Physics Letters 82 (17), 2758-2760, 2003-04-28
AIP Publishing
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詳細情報 詳細情報について
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- CRID
- 1361699996043420416
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- NII論文ID
- 30015798472
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- ISSN
- 10773118
- 00036951
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- HANDLE
- 1959.3/214878
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