Crystallization of germanium–antimony–tellurium amorphous thin film sandwiched between various dielectric protective films

DOI PDF 被引用文献24件
  • Norikazu Ohshima
    Functional Devices Research Laboratories, NEC Corporation, 1-1 Miyazaki 4-chome, Miyamae-ku, Kawasaki, Kanagawa 216, Japan

書誌事項

公開日
1996-06-01
DOI
  • 10.1063/1.362548
公開者
AIP Publishing

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説明

<jats:p>Crystallization processes were studied for germanium–antimony–tellurium (Ge–Sb–Te) ternary amorphous thin film as a single layer or sandwiched between various dielectric films, such as silicon dioxide (SiO2), siricon nitride (Si3N4), tantalum oxide (Ta2O5), zinc sulfide (ZnS), and ZnS–20 mol % SiO2. The processes were analyzed quantitatively, based on transmittance changes in Ge–Sb–Te films heated either exothermally or isothermally. Both Kissinger equation and Johnson–Mehl–Avrami kinetic analysis were adopted to estimate activation energy and the reaction order of the processes. Ge–Sb–Te single-layer amorphous film crystallized in two stages, nucleation and crystal growth. These two processes can be distinguished by exothermal crystallization patterns. By sandwiching this film into dielectric films, crystallization activation energy increases and the nucleation processes are affected. The Si3N4 and Ta2O5 dielectric films accelerate the nucleation, while the SiO2 films inhibit it, and the ZnS and ZnS–20 mol % SiO2 films promote the nucleation even in the grain growth process. Wettability measurements indicate that surface reactivity and chemical affinity are the factors which produce this variation.</jats:p>

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