Velocity distribution of organic molecules emitted from effusion cells measured by time-of-flight technique
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- Toshihiro Shimada
- Department of Chemistry, The University of Tokyo, Bunkyo-ku, Tokyo 113-0033, Japan
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- Jun Koide
- Department of Chemistry, The University of Tokyo, Bunkyo-ku, Tokyo 113-0033, Japan
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- Kyoung Ah Cho
- Department of Chemistry, The University of Tokyo, Bunkyo-ku, Tokyo 113-0033, Japan
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- Atsushi Koma
- Department of Chemistry, The University of Tokyo, Bunkyo-ku, Tokyo 113-0033, Japan
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説明
<jats:p>Velocity distribution of the molecules emitted from effusion cells commonly used in molecular beam epitaxy was measured by using time-of-flight technique. The result for organic molecular phthalocyanine can be fitted by a shifted Maxwellian distribution. The effects of the temperature and the aspect ratios of the sources are discussed.</jats:p>
収録刊行物
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- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (2), 615-618, 1999-03-01
American Vacuum Society
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詳細情報 詳細情報について
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- CRID
- 1361981469810337408
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- DOI
- 10.1116/1.581627
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- ISSN
- 15208559
- 07342101
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- データソース種別
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- Crossref
- OpenAIRE