Reactive Ion Etching of Indium‐Tin‐Oxide Films

DOI Web Site Web Site 被引用文献4件
  • Z. Calahorra
    Department of Electrical Engineering and Computer Sciences, Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720
  • E. Minami
    Department of Electrical Engineering and Computer Sciences, Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720
  • R. M. White
    Department of Electrical Engineering and Computer Sciences, Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720
  • R. S. Muller
    Department of Electrical Engineering and Computer Sciences, Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720

書誌事項

公開日
1989-06-01
権利情報
  • https://iopscience.iop.org/page/copyright
  • https://iopscience.iop.org/info/page/text-and-data-mining
DOI
  • 10.1149/1.2097042
公開者
The Electrochemical Society

この論文をさがす

収録刊行物

被引用文献 (4)*注記

もっと見る

詳細情報 詳細情報について

問題の指摘

ページトップへ