Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition

DOI Web Site 1 Citations

Journal

Journal of The Electrochemical Society

Journal of The Electrochemical Society 158 (8), G169-, 2011

The Electrochemical Society

Citations (1)*help

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Details 詳細情報について

CRID

1361981470410677760
DOI

10.1149/1.3594766
ISSN

00134651
Web Site

https://syndication.highwire.org/content/doi/10.1149/1.3594766
Data Source
- Crossref

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