Object localization with 10nm accuracy by x-ray phase contrast projection imaging

C. Ollinger, C. Fuhse, S. Kalbfleisch, R. Tucoulou, T. Salditt

doi:10.1063/1.2757601

Object localization with 10nm accuracy by x-ray phase contrast projection imaging

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C. Ollinger

Universität Göttingen Institut für Röntgenphysik, , Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
C. Fuhse

Universität Göttingen Institut für Röntgenphysik, , Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
S. Kalbfleisch

Universität Göttingen Institut für Röntgenphysik, , Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
R. Tucoulou

Universität Göttingen Institut für Röntgenphysik, , Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
T. Salditt

Universität Göttingen Institut für Röntgenphysik, , Friedrich-Hund-Platz 1, 37077 Göttingen, Germany

抄録

<jats:p>The present work focuses on the question of localizing single object by hard x-ray phase contrast projection imaging. The authors present a setup where an x-ray channel waveguide defines a “quasi-point source” used to illuminate and image an object in a highly coherent cone beam. Knife edge fluorescence scans revealed a beam diameter of 75nm at a distance of 30μm behind the guide. The recorded image corresponds to an in-line hologram of the object which can be reconstructed numerically. Object translations and associated shifts in the hologram allow for the 10nm localization accuracy.</jats:p>