Resistive switching memory effect of ZrO2 films with Zr+ implanted

  • Qi Liu
    Institute of Microelectronics Laboratory of Nano-fabrication and Novel Devices Integrated Technology, , Chinese Academy of Sciences, Beijing 100029, People’s Republic of China
  • Weihua Guan
    Institute of Microelectronics Laboratory of Nano-fabrication and Novel Devices Integrated Technology, , Chinese Academy of Sciences, Beijing 100029, People’s Republic of China
  • Shibing Long
    Institute of Microelectronics Laboratory of Nano-fabrication and Novel Devices Integrated Technology, , Chinese Academy of Sciences, Beijing 100029, People’s Republic of China
  • Rui Jia
    Institute of Microelectronics Laboratory of Nano-fabrication and Novel Devices Integrated Technology, , Chinese Academy of Sciences, Beijing 100029, People’s Republic of China
  • Ming Liu
    Institute of Microelectronics Laboratory of Nano-fabrication and Novel Devices Integrated Technology, , Chinese Academy of Sciences, Beijing 100029, People’s Republic of China
  • Junning Chen
    Anhui University College of Electronics and Technology, , Hefei 230039, People’s Republic of China

書誌事項

公開日
2008-01-07
DOI
  • 10.1063/1.2832660
公開者
AIP Publishing

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説明

<jats:p>The Au∕Cr∕Zr+-implanted-ZrO2∕n+-Si sandwiched structure exhibits reversible bipolar resistive switching behavior under dc sweeping voltage. The resistance ratio (Rratio) of high resistive state and low resistive state is as large as five orders of magnitude with 0.5V readout bias. Zr+-implanted-ZrO2 films exhibit good retention characteristics and high device yield. The impact of implanted Zr+ ions on resistive switching performances is investigated. Resistive switching of the fabricated structures is explained by trap-controlled space charge limited current conduction.</jats:p>

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