Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas

DOI PDF 被引用文献19件
  • Tsuyoshi Ando
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Shinsuke Fujioka
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Hiroaki Nishimura
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Nobuyoshi Ueda
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Yuzuri Yasuda
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Keiji Nagai
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Takayoshi Norimatsu
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Masakatsu Murakami
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Katsunobu Nishihara
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Noriaki Miyanaga
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Yasukazu Izawa
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Kunioki Mima
    Osaka University Institute of Laser Engineering, , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan
  • Atsushi Sunahara
    Institute for Laser Technology , 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan

書誌事項

公開日
2006-10-09
DOI
  • 10.1063/1.2361260
公開者
AIP Publishing

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説明

<jats:p>Conversion efficiencies (CEs) from incident laser energy to 13.5nm light within a 2% bandwidth were measured with changing laser pulse durations for laser-produced tin plasmas. Experimental results indicate that the optimum pulse duration is determined by two parameters: one is the optical depth of tin plasma for 13.5nm light and the other is laser absorption rate in 13.5nm emission-dominant region. The maximum CE of 2.2% is obtained with pulse duration of 2.3ns.</jats:p>

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