Effect of substrate temperature and bias voltage on the crystallite orientation in RF magnetron sputtered AlN thin films

詳細情報 詳細情報について

• CRID

  1362262944331618816

• DOI

  10.1016/j.tsf.2005.12.145

• ISSN

  00406090

• Web Site

  https://api.elsevier.com/content/article/PII:S0040609005024193?httpAccept=text/xml

  https://api.elsevier.com/content/article/PII:S0040609005024193?httpAccept=text/plain

• データソース種別

  • Crossref