Changes in refractive index and in chemical state of synchrotron radiation irradiated fluorinated polyimide films

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<jats:p>Changes in refractive index and in film thickness caused by synchrotron radiation are studied in a fluorinated polyimide (6FDA/TFDB). The index at 589.6 nm increased by 1.3% and the thickness decreased by 0.69% for 8-μm-thick film after 30 min irradiation. X-ray photoelectron spectroscopy analysis was performed on the modified surfaces after synchrotron radiation exposure. From the present data the synchrotron radiation leads to production of a fluorine-poor surface.</jats:p>

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