Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level

DOI PDF 被引用文献10件
  • S. Matsuyama
    Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • H. Mimura
    Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • H. Yumoto
    Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • H. Hara
    Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • K. Yamamura
    Osaka University Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Y. Sano
    Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • K. Endo
    Osaka University Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Y. Mori
    Osaka University Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • M. Yabashi
    SPring-8/Japan Synchrotron Radiation Research Institute (JASRI) , 1-1-1 Kouto, Mikazuki, Hyogo 679-5148, Japan
  • Y. Nishino
    SPring-8/RIKEN , 1-1-1 Kouto, Mikazuki, Hyogo 679-5148, Japan
  • K. Tamasaku
    SPring-8/RIKEN , 1-1-1 Kouto, Mikazuki, Hyogo 679-5148, Japan
  • T. Ishikawa
    SPring-8/RIKEN , 1-1-1 Kouto, Mikazuki, Hyogo 679-5148, Japan
  • K. Yamauchi
    Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

書誌事項

公開日
2006-09-01
DOI
  • 10.1063/1.2349594
公開者
AIP Publishing

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説明

<jats:p>X-ray focusing using Kirkpatrick-Baez (KB) mirrors is promising owing to their capability of highly efficient and energy-tunable focusing. We report the development of a mirror manipulator which enables KB mirror alignment with a high degree of accuracy. Mirror alignment tolerances were estimated using two types of simulators. On the basis of the simulation results, the mirror manipulator was developed to achieve an optimum KB mirror setup. As a result of focusing tests at BL29XUL of SPring-8, the beam size of 48×36nm2 (V×H) was achieved in the full width at half maximum at an x-ray energy of 15keV. Spatial resolution tests showed that a scanning x-ray microscope equipped with the KB focusing system could resolve line-and-space patterns of 80nm linewidth in a high visibility of 60%.</jats:p>

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