Grain boundary diffusion and growth of titanium silicide layers on silicon

詳細情報 詳細情報について

• CRID

  1362262946370495488

• DOI

  10.1007/bf02673330

• ISSN

  1543186X

  03615235

• Web Site

  http://link.springer.com/content/pdf/10.1007/BF02673330.pdf

  http://link.springer.com/article/10.1007/BF02673330/fulltext.html

  http://link.springer.com/content/pdf/10.1007/BF02673330

• データソース種別

  • Crossref