Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

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Yue-Cun Wang

Center for Advancing Materials Performance from the Nanoscale; State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049 P. R. China
Lin Tian

Center for Advancing Materials Performance from the Nanoscale; State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049 P. R. China
Fan Liu

School of Materials Science and Engineering; Nanjing University of Science and Technology; Nanjing 210094 P. R. China
Yuan-Bin Qin

Center for Advancing Materials Performance from the Nanoscale; State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049 P. R. China
Gong Zheng

Engineering Research Center of Materials Behavior and Design; Ministry of Education; Nanjing University of Science and Technology; Nanjing 210094 P. R. China
Jing-Tao Wang

School of Materials Science and Engineering; Nanjing University of Science and Technology; Nanjing 210094 P. R. China
Evan Ma

Center for Advancing Materials Performance from the Nanoscale; State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049 P. R. China
Zhi-Wei Shan

Center for Advancing Materials Performance from the Nanoscale; State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049 P. R. China

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