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- J. Yamasaki
- EcoTopia Science Institute, Nagoya University 1 , Furo-cho, Chikusa-ku, 464-8603 Nagoya, Japan
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- K. Ohta
- Nagoya University 2 Department of Crystalline Materials Science, , Furo-cho, Chikusa-ku, 464-8603 Nagoya, Japan
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- S. Morishita
- Nagoya University 2 Department of Crystalline Materials Science, , Furo-cho, Chikusa-ku, 464-8603 Nagoya, Japan
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- N. Tanaka
- EcoTopia Science Institute, Nagoya University 1 , Furo-cho, Chikusa-ku, 464-8603 Nagoya, Japan
説明
<jats:p>A method for quantitative phase imaging of electron waves was developed based on diffractive imaging. Phase images over field of views of more than 100 nm were reconstructed from pairs of a selected-area diffraction pattern and a transmission electron microscopy image. The illumination wave field was reconstructed uniformly with a phase fluctuation of less than 0.1 rad and a spatial resolution of 2-3 nm. The phase image for wedge-shaped silicon was converted to a thickness map, which agreed quantitatively with electron energy-loss spectroscopy. The present method is also valid for arbitrary-shaped samples even if dynamical diffraction effects are significant.</jats:p>
収録刊行物
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- Applied Physics Letters
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Applied Physics Letters 101 (23), 234105-, 2012-12-03
AIP Publishing