Thermal conductivity of diamond-like carbon films

  • M. Shamsa
    University of California Department of Electrical Engineering, , Riverside, California 92521
  • W. L. Liu
    University of California Department of Electrical Engineering, , Riverside, California 92521
  • A. A. Balandin
    University of California Department of Electrical Engineering, , Riverside, California 92521
  • C. Casiraghi
    Cambridge University Engineering Department, , Cambridge CB3 0FA, United Kingdom
  • W. I. Milne
    Cambridge University Engineering Department, , Cambridge CB3 0FA, United Kingdom
  • A. C. Ferrari
    Cambridge University Engineering Department, , Cambridge CB3 0FA, United Kingdom

説明

<jats:p>The authors report the thermal conductivity (K) of a variety of carbon films ranging from polymeric hydrogenated amorphous carbons (a-C:H) to tetrahedral amorphous carbon (ta-C). The measurements are performed using the 3ω method. They show that thermal conduction is governed by the amount and structural disorder of the sp3 phase. If the sp3 phase is amorphous, K scales linearly with the C–C sp3 content, density, and elastic constants. Polymeric and graphitic films have the lowest K (0.2–0.3W∕mK), hydrogenated ta-C:H has K∼1W∕mK, and ta-C has the highest K (3.5W∕mK). If the sp3 phase orders, even in small grains such as in micro- or nanodiamond, a strong K increase occurs for a given density, Young’s modulus, and sp3 content.</jats:p>

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