Parameter and Reactor Dependence of Selective Oxide RIE in  CF 4 +  H 2

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  • L. M. Ephrath
    IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
  • E. J. Petrillo
    IBM T. J. Watson Research Center, Yorktown Heights, New York 10598

Bibliographic Information

Published
1982-10-01
Rights Information
  • https://iopscience.iop.org/page/copyright
  • https://iopscience.iop.org/info/page/text-and-data-mining
DOI
  • 10.1149/1.2123494
Publisher
The Electrochemical Society

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