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Vapor-Phase Deposition of Beta-Silicon Carbide on Silicon Substrates
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Journal
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- Journal of The Electrochemical Society
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Journal of The Electrochemical Society 120 (1), 138-, 1973
The Electrochemical Society
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Keywords
Details 詳細情報について
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- CRID
- 1362825893264172800
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- ISSN
- 00134651
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- Data Source
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- Crossref
