書誌事項
- 公開日
- 1988
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- https://www.elsevier.com/legal/tdmrep-license
- DOI
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- 10.1016/0039-6028(88)90645-0
- 公開者
- Elsevier BV
この論文をさがす
説明
A theoretical model is proposed for Monte Carlo simulation of backscattering and secondary electron generation by keV electrons. The purpose of this study is to derive more accurate full energy spectra N(E) appearing as a background in Auger electron spectroscopy (AES), from the elastic peak to the low energy secondaries. The model is based on the combined use of Gryzinski's inner-shell electron excitation function and the dielectric function for taking account of the valence electron contribution in inelastic scattering processes. This theoretical treatment was, first, examined for Si, Cu and Au by deriving the inelastic mean free paths (IMFP) and comparing these with the experimental data and then a simulation was applied for those elements at a primary energy of 3 keV. The result has provided the energy distributions of backscattered and cascade secondary electrons, which agree very well with experiment. Another application has been also made to simulate how the EN(E) spectra near the elastic peak change with the coverage of Cu atoms of several atomic layers on Si. The present approach is particularly useful for obtaining fine structures in N(E) spectra if required and for describing the behaviour of slow electrons in all kinds of solids provided that the dielectric function is available for those materials.
収録刊行物
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- Surface Science
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Surface Science 197 (3), 539-554, 1988
Elsevier BV